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phase_change Vortex Tapping Resistance NCM Plug Microchannel CP-AFM LithiumNiobate EvatecAG Nanotechnology Array Gold Water Bmp ElectrostaticForceMicroscopy Pyroelectric NUSNNI Force-distance CancerCell Ananth Blood FAFailureAnlaysis Mfm Layer Sphere OpticalModulator INSPParis SolarCell Aluminium_Oxide Deposition MembraneFilter biocompatible 2d_materials temperature controller AFM