11 Oct 2023
Spectroscopic IMAGING ELLIPSOMETRY with new high speed measurement mode
Thickness and composition of a multi layer film need
to be mapped over larger samples with high speed .
Imaging ellipsometry with the nanofilm_ep4
combines the sensitivity for thickness and spectral
refractive index measurements of ellipsometry with
the benefits of magnification and lateral resolution
of optical microscopy down to 1μm.
