フォトニクス

24 Nov 2023

Refractive Index Measurement of Waveguides and Fibers by Imaging Ellipsometry

Spectral dispersion of refractive index needs to be measured on microscopic core region in waveguides and optical fibers. The difference of refractive index between core and clad region may be as small as 0.001 at very low doping concentrations. Imaging ellipsometry with the nanofilm_ep4 offers highest lateral ellipsometric resolution down to 1 µm. It combines the sensitivity for thickness and spectral refractive index measurements of ellipsometry with the benefits of magnification and lateral resolution of optical microscopy.

11 Oct 2023

Refractive Index Measurement of Waveguides BY IMAGING ELLIPSOMETR

The dispersive refractive index needs to be measured on 8 μm wide waveguides of LiNbO3 . Additionally, the thickness of an SiO2 layer is to be determined on the waveguides and on clad region. Imaging ellipsometry with the nanofilm_ep4 offers highest lateral ellipsometric resolution down to 1 μm. It combines the sub-nanometer sensitivity for thickness and precise spectral refractive index measurements of ellipsometry with the benefits of magnification and high lateral resolution of optical microscopy.