TempControl Litho Piranha Pattern self_assembly SicMosfet Foil Anneal ScanningSpreadingResistanceMicroscopy HanyangUniv Non-ContactMode Conductivity lift_mode Nanostructure phase_change LightEmiting Imprint epitaxy EFMAmplitude LDPE Melt IndiumTinOxide Reduction Step NCM PUR biocompatible PhaseImaging molecular_beam Wang BaTiO3 LFM GlassTemp SoftSample amplitude_modulation