NCM BoronNitride temperature_control Vinylpyridine TemperatureControl PtfeMembrane Sio2 PinpointNanomechanicalMode Semiconductor HfO2 LogAmplifier IMT_Bucharest Co/Cr/Pt GlassTemp SetpointMode Film Sphere Indent LiftHeight Spincast AlkaneFilm Chemical_Vapor_Deposition dielectric trench CalciumHydroxide MoirePattern Treatment PtfeFilter SrTiO3 Permalloy LiIonBattery Step oxide_layer HighAspect Grain Ceramics