Piezo Polyvinylidene_fluoride Leakage GaAs BiFeO3 Glass SiliconOxide Techcomp Ito Indium_tin_oxide SAM Sulfur Aluminum AEAPDES temperature_control LeakageCurrent Sidewall organic_polymer electrospinning DeoxyribonucleicAcid Trench Steps ScanningIon-ConductanceMicroscopy PolycrystallineFerroelectricBCZT FailureAnlaysis phase_change CVD Scratch doped gallium_nitride multi_layer ito_film molecular_self_assembly PMNPT atomic_layer