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Zagreb SicMosfet Polytetrafluoroethylene Leakage fluoroaalkane Plug membrane Piezoelectric blended polymers molecules LFM Electrode Imprint OpticalModulator Hafnium_dioxide Genetic DOE Worcester_Polytechnic_Institute Trench KPFM TiO2 BFO biocompatible self_assembly FastScan Deposition TemperatureControl thermoplastic_elastomers AtomicSteps nanomechanical Chemical_Vapor_Deposition lithography Carbon Current Steps