NCM PolyStylene SmallScan dielectric trench block_copolymer HighAcpectRatio C60H122 LiquidCell lithography sputter fifber Anneal FuelCell Regensburg PinPointMode AnodizedAluminumOxide LiquidImaging Lift Sphere Steps ScanningKelvinProbeMicroscopy Metal Al2O3 DeoxyribonucleicAcid PhaseImaging Gong PatternedSapphireSubstrat Led Optoelectonics Flake SThM CeNSE_IISc ContactModeDots Dimethicone Genetic