Chromium University_of_Regensburg Vac WWafer SoftSample biocompatible Sidewall small_scan Melt Electronics Pyroelectric Foil Polyimide temp CeNSE_IISc Hafnia Nanopattern HighAcpectRatio MechanicalProperty SmalScan ElectroDeposition SiWafer Yttria_stabilized_Zirconia SAM ForceVolumeMapping molecules FastScan Bio Polarization BloodCell SelfAssembly Chrome Multiferroic_materials ThinFilm YttriaStabilizedZirconia