AtomicLayer Titanate Copper Sio2 GaP dichalcogenide Hole Korea Optic INSP DLaTGS layers margarine PhthalocyaninePraseodymium HighAcpectRatio HighAspect InsulatorFilm Deposition MechanicalProperties epitaxy SrO TempControl Dr.JurekSadowski conductive Kevlar DOE NUS fe_nd_b Magnetic Aluminum EvatecAG Vacuum self_healing FastScan SKKU