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Diffractive Optical Elements
Scanning Conditions
- System: NX20
- Scan Mode: Non-contact
- Cantilever: AC160TS (k=26N/m, f=300kHz)
- Scan Size: 40μm×40μm, 5μm×5μm
- Scan Rate: 0.3Hz, 0.4Hz
- Pixel: 512×256, 512×256