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cross section Annealing Litho Anneal dielectric_trench GlassTemperature Hafnia Holes Fet Fluoride ThermalDetectors heterojunctions MESA structure Scratch align DNAProtein Optoelectonics InsulatorFilm OrganicCompound MLCC PinPointMode HardDiskMedia China Defect layers Self-assembledMonolayer DNA food NUSNNI UnivMaryland LiftMode Electrical&Electronics SmallScan ContactModeDots single_layer