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HfO2 into Indium Tin Oxide Film
ITO film on 1% HfO2-doped Yttria-stabilized Zirconia (001) orientation grown by pulsed laser deposition. Surface segregation of HfO2 into ITO film.
Scanning Conditions
- System: NX10
- Scan Mode: Non-contact
- Cantilever: AC160TS (k=26N/m, f=300kHz))
- Scan Size: 10μm×10μm,5μm×5μm
- Scan Rate: 0.6Hz, 1Hz
- Pixel Size: 256 × 256, 256 x 256
- Scan Mode: Non-contact
- Cantilever: AC160TS (k=26N/m, f=300kHz))
- Scan Size: 10μm×10μm,5μm×5μm
- Scan Rate: 0.6Hz, 1Hz
- Pixel Size: 256 × 256, 256 x 256