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FAFailureAnlaysis PFM DiffractiveOpticalElements single_layer EFM Microchannel DLaTGS Mechanical semifluorinated_alkane Temasek_Lab ScanningThermalMicroscopy IndiumTinOxide Platinum Worcester_Polytechnic_Institute Polymer OrganicCompound InorganicCompound ContactModeDots sputter ito_film LeakageCurrent YszSubstrate SAM Liquid Gong Water LateralPFM Collagen Gold Sphere InLiquid PetruPoni_Institute Phthalocyanine Alloy Wang