Sadowski Chemical_Vapor_Deposition Al2O3 TempControl Film Bmp Piezoresponse cooling LiftMode HfO2 molecular_beam Inorganic_Compound Litho Yttria_stabilized_Zirconia suspended_graphene ReflexLens Galfenol SSRM molecular_self_assembly LateralPFM HexagonalBN CrAu Gong AtomicLayer AM_SKPM ForceMapping self-assembled_monolayer LateralForce MembraneFilter Phosphide temp pinpoint mode Adhesion DOE Optoelectonics