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CHRYSALIS_INC Ucl Regensburg Conducting Lattice InsulatorFilm Chemical_Vapor_Deposition GlassTemp LiftMode LeakageCurrent 2d_materials Insulator epitaxy C60H122 CalciumHydroxide Ni-FeAlloy oxide_layer Au111 STM Silver Glass FailureAnlaysis STO Epoxy Chloroform Multiferroic_materials KPFM Varistor Topography membrane Non-ContactMode Layer Singapore KAIST MfmAmplitude
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CMP test key
Scanning Conditions
- System : NX-Wafer
- Scan Mode: Non-contact
- Scan Rate : 1Hz for 100μm2 / 1.5Hz for 30μm2
- Scan Size : 100μm2, 30μm2
- Pixel Size : All 1024×512
- Cantilever : CMCL-AC240TS (k=2N/m, f=70kHz)