Piezo ForceDistanceSpectroscopy STO Electrical&Electronics ThinFilm Electical&Electronics lithography Kevlar sputter Logo Polyimide GaAs Tin sulfide InLiquid Granada #EC plastic Varistor Microchannel Transparent MagneticPhase piezoelectric force microscopy ContactModeDot Worcester_Polytechnic_Institute TappingMode silicon_carbide Global_Comm ito_film LFM FailureAnalysis OxideLayer TemperatureControlledAFM SiliconCrystal Galfenol Wang