AlkaneFilm MechanicalProperties temp_control MBE phase_change Tape PECurve Copper SoftSample alkanes SiliconeOxide Ni-FeAlloy Hafnia Korea University_of_Regensburg Pore graphene_hybrid LiftHeight PinpointNanomechanicalMode IRDetector BreastCancerCell Nanopattern FrictionalForce Vanadate Piranha BFO Step Plug BoronNitride Chromium Regensburg Sic GranadaUniv HighAspect Roughness