frequency_modulation FrequencyModulation Etch GaAs cooling Biology SICM BaTiO3 Solution Galfenol PhaseChange AdhesionEnergy Inorganic hydrocarbon NUS_NNI_Nanocore Tapping Aluminum Indent dielectric trench Current Gold Display BariumTitanate HexagonalBoronNitride Silicon Fluoride Treatment STM ContactMode SPMLabs MagneticForce Bacteria Chemical_Vapor_Deposition Heat MESA structure