SoftSample Yeditepe_University Ito WPlug atomic_steps lithography Metal Platinum Vacuum Phase TemperatureControllerAFM AtomicLayer Defect Insulator Scratch SiliconCrystal Regensburg Tungsten self_healing Sidewall PinPointMode hetero_structure Liquid F14H20 IVSpectroscopy Polyvinylidene contact CrAu medical SingleLayer VinylAlcohol GalliumPhosphide kelvin probe force microscopy Neodymium optoelectronics