lithography thermoplastic_elastomers Electronics atomic_layer SICM Inorganic_Compound Topography Aluminium_Oxide Polarization Alkane Calcium INSP PDMS Celebration MeltingPoint OpticalWaveguides molecules Thermal LaAlO3 Indium_tin_oxide Molybdenum Cobalt Spain FFM CopperFoil FrictionalForceMicroscopy Heat 2dMaterials CeramicCapacitor ImideMonomer Chemical_Vapor_Deposition contact CrossSection CarbonNanotube HfO2