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  • Park
    NX20 Lite
    AFM Specifications

Park NX20 Lite Specifications

Scanner

Z Scanner

Flexure guided high-force scanner
Scan range:
15 μm (optional 30 μm)

XY Scanner

Single module flexure XY-scanner with closed-loop control
Scan range:
100 µm × 100 µm

 

Stage

XY stage travel range: 200 mm (Motorized) (150 mm optional),
optional precision encoders for better XY stage repeatability
Z stage travel range: 25.5 mm (Motorized),
optional precision encoder for better Z stage repeatability
Focus stage travel range: 8 mm (Motorized)

 

Sample Mount

Sample size: Up to 200 mm wafer sample
(Optional 200 mm Vacuum Sample Chuck)

 

On-Axis Optics

10x (0.21 N.A.) ultra-long working distance lens (1µm resolution)
Direct on-axis vision of sample surface and cantilever
Field-of-view : 480 × 360 µm (with 10× objective lens)
CCD : 1.2 M pixel, 5 M pixel (optional)
(optional; Field-of-view: 840 µm x 630 µm)

 

Software

SmartScan™

• AFM system control and data acquisition software
• Auto mode for quick setup and easy imaging
• Manual mode for advanced use and finer scan control

SmartAnalysis™

• AFM data analysis software
• Stand-alone design—can install and analyze data away from AFM
• Capable of producing 3D renders of acquired data

 

Electronics

4 channels of flexible digital lock-in amplifier
Spring constant calibration (Thermal method)
Digital Q control

 

Dielectric/Piezoelectric Properties

Electric Force Microscopy (EFM)
Piezoresponse Force Microscopy (PFM)
PFM with High Voltage*

Mechanical Properties

Force Modulation Microscopy (FMM)
Nanoindentation
Nanolithography*
Nanolithography with High Voltage*
Nanomanipulation*

 
 

Accessories*

• Universal Liquid Cell with Temperature Control
• Temperature Controlled Stage 1, 2 and 3
• Electrochemistry Cell
• High-field Magnetic Field Generator