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GaN on Si epi film

GaN_on_Si_epi_film

Scanning Conditions

- System : NX20
- Scan Mode: Non-contact
- Scan Rate : All 2 Hz
- Scan Size : 5µm2, 5µm2
- Pixel Size : ALL 512×512
- Cantilever : OMCL-AC160TS (k=26N/m, f=300kHz)