AtomicLayer TungstenThinFilmDeposition CrAu GlassTemp CNT MoS2 University_of_Regensburg Boundary CuFoil AIN aluminum_nitride Bmp self_assembly cannabinoid DentalProsthesis PMNPT MonoLayer HBN VortexCore biocompatible MechanicalProperties MembraneFilter Croatia Magnetic Force Microscopy Deposition LateralPFM StainlessSteel OrganicSemiconductor GaN Gallium_Arsenide FAPbI3 FastScan Cobalt-dopedIronOxide IVSpectroscopy layers