Ca10(PO4)6(OH)2 YszSubstrate conductive MechanicalProperties mono_layer GaP TPU ElectroDeposition lithography SiWafer PhaseTransition InorganicCompound Scanning_Thermal_Microscopy Indium_tin_oxide SSRM PtfeFilter I-VSpectroscopy SiliconeOxide Polymer TipBiasMode Spincast Polyimide hydrocarbon TungstenThinFilmDeposition Force-distance PolyimideFilm Gallium_Arsenide Organic FM_SKPM Nanopattern fifber Lanthanum_aluminate Bacteria TransitionMetal MBE