NUS_NNI_Nanocore Boron Ram Jason SFAs hetero_structure contact dielectric trench Gallium_Arsenide StainlessSteel Al2O3 PolyimideFilm PolymerBlend atomic_steps Pvdf Defect LMF small_scan Vacuum Copper Hafnium_dioxide self_healing MolybdenumDisulfide dielectric_trench PetruPoni fluoroaalkane Aluminum MetalCompound AEAPDES PinpointPFM AdhesionForce MultiLayerCeramicCapacitor Silicon NUSNNI TungstenThinFilmDeposition