epitaxy SiliconOxide AlkaneFilm Anneal HexacontaneFilm Chemical_Vapor_Deposition CaMnO3 Christmas Indent LeakageCurrent Boundary AnodizedAluminumOxide MechanicalProperties Graphene MoS2 FM_KPFM mechanical_property Hafnium_dioxide doped CNT AAO LaAlO3 temperature_control FM-KPFM INSPParis ConductingPolymer fe_nd_b HexagonalBoronNitride nanomechanical Yeditepe EvatecAG PANI LateralPFM lithography 2-vinylpyridine