TungstenDeposition dielectric_trench DentalProsthesis Pattern Resistance Imprint NanoLithography HighResolution BariumTitanate nanomechanical Subhajjit IcelandSpar Roughness Collagen CaMnO3 Polyurethane Fiber atomic_steps Chemical_Vapor_Deposition Fe_film ForceMapping HexagonalBN MembraneFilter EFMAmplitude LateralPFM Chromium HardDisk Sadowski CuSubstrate Foil Calcite neodymium_magnets Annealing semifluorinated alkane Molybdenum_disulfide