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IVSpectroscopy Ca10(PO4)6(OH)2 GaP SrO Composite PiezoelectricForceMicroscopy ItoGlass SingleLayer Ito Topography Conductivity dichalcogenide doped SicMosfet IRDetector BiVO4 AM_SKPM PolyvinylideneFluoride Fe_film HafniumDioxide Austenite Solar Annealed Ferroelectric RedBloodCell YttriaStabilizedZirconia CuFoil high_resolution Wonseok Roughness FrictionalForce Memory Piezoelectric DLaTGS TiO2
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CMP test key
Scanning Conditions
- System : NX20
- Scan Mode: Non-contact
- Scan Rate : 1Hz for 25μm2 / 0.6HZ for 15μm2
- Scan Size : 25μm2, 15μm2
- Pixel Size : 512×256 for 25μm2 / 1025×128 for 15μm2
- Cantilever : PPP-NCHR (k=42N/m, f=330kHz)